MEMS/NEMS Devices and Systems
Course Name:
MEMS/NEMS Devices and Systems (NT762)
Programme:
M.Tech. in Nanotechnology
Semester:
Second
Category:
Elective Courses (Ele)
Credits (L-T-P):
(3-0-0) 3
Course modules and teaching hours:
MEMS & NEMS overview, sensors, transducers and actuators designing, Basics of MEMS engineering, scaling laws, materials for MEMS and NEMS; microsystem manufacturing: photolithography, bulk, surface and LIGA processes, comparison of wet and dry etching, striction, methods to reduce striction, microsystem design, CAD applications in MEMS design, Applications of MEMS and NEMS in automotive, aircraft, medical electronics, and sensor systems.
References:
Tai Ram Hsu, MEMS and micrsystems Design and Manufacturing, Tata McGraw Hill, 2002.
M.J. Madou, Fundamentals of microfabrication the science of miniaturization, IEEE Press,
S.D. Senturia, Microsystems Design, Kluwer Academic Publishing, 2003.
Department:
Metallurgical and Materials Engineering